Seiko Seiki STP-300H Turbo Molecular Vacuum Pump With STP Control Unit & Cables

Description

Seiko Seiki STP-300H High Throughput Turbo Molecular Vacuum Pump With STP Control Unit & Cables
Description:
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure. Their advanced rotor design combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 300 ls-1 to 4500 ls-1.
Specifications:
Type: High Throughput Turbomolecular Vacuum Pump
Manufacturer: Seiko Seiki
Condition: Use
Inlet: ISO-K 100
Exhaust: KF-25 / QF-25
Pumping speed: 340 l/s (N2)
Compression ratio: > 10^8 (N2)
Weight: 27 lbs
Applications: Plasma etch, ECR etch, film deposition, sputtering, ion implantation source, beam line pumping, MBE, diffusion, photo resist stripping, crystal / expitaxial growth, wafer inspection, load lock chambers
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